Arbeitskreis Modellierung von Systemen und
Parameterextraktion Modeling of Systems and Parameter Extraction Working Group MOS-AK ESSDERC/ESSCIRC Workshop 20 September 2004, Leuven |
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9:25- 9:30 |
Welcome: W.Grabinski |
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9:30-12:10 |
Morning Session Chairmen: Prof. H.Iwai and W. Grabinski |
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Bart Nauwelaers and Dominique Schreurs; KUL Leuven Presentation of the Modeling and Design Activities at ESAT-KUL |
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Phil A. Mawby; University of Wales Swansea Power devices compact modeling |
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Hany Mohamed Taher Abdelrahmanm; KUL Leuven Behavior modeling for LDMOS devices |
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Coffee Break |
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Matthias Bucher, Francois Krummenacher*, A. Bazigos**; TUC, Chania, *EPFL, Lausanne, **NTUA, Athens Advances in MOSFET charges modeling |
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Nobuyuki Itoh; Toshiba MOSFET modeling for RF circuit design |
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J. Ramos, A. Mercha, W. Jeamsaksiri, D. Linten1, S. Jenei,
S. Thijs, A.J. Scholten2, P. Wambacq1, I. Debusschere, S. Decoutere;
IMEC Leuven, 1 Also with the Vrije Universiteit Brussel, 2Philips
Research Eindhoven, A 90nm RF CMOS technology supported by device modeling and circuit demonstrators |
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12:10-12:30 |
Poster Session Chairman: W.Grabinski |
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Ahmed Alabadelah, Dominique Schreurs, Cornell van Niekerk*, and Bart Nauwelaers; K.U.Leuven and *University of Stellenbosch Methodology to validate and inter-compare RF models V.A. Gergel, M.N. Yakupov; Russia Academy of Science Quasi-hydrodynamic extension of gradual channel and charge sheets approximations of MOSFET models Fadhila Haned*, Mohamed BenChouikha*, Andre Baguenier Desormeaux**, Georges Alquié** LISIF, Université Pierre et Marie Curie* Cadence Design Systems Verilog-A behavioral models of optoelectronic devices for Color Sensor Design Patrick Mulder, Evelyn Grossar; IMEC Compact modeling of digital circuits in deep-submicron CMOS R. F. Scholz, B. Senapati, W. Kissinger, E. Matthus and S. Jaetzlau; IHP Microelectronics A Differentiated MPW and Prototyping Service with Advanced RF Performance Rob Streeder, Agilent Measurement Solutions without Compromise: Agilent 41000 Series, Integrated Parametric Analysis and Characterization Environment (iPACE) Marc Vanden Bossche, NMDG Engineering bvba A new dimension to transistor characterization and modeling through large-signal network analysis NMDG Engineering Marek Mierzwinski; Tiburon Design Automation, Santa Rosa, CA New Capabilities for Verilog-A Compact Device Models |
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12:30-14:00 | Lunch |
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14:00-17:00 |
Afternoon Session Chairmen: Prof. B.Nauwelaers and W.Grabinski |
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Gerard Dubois, Jean-Marc Rousseau, Daniel Andrade; Altis Semiconductor Using TCAD to Minimize Process Dispersions |
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R.Müller, J.Kusterer, P.Schmid, K.Janischowsky, F.J.
Hernandez-Guillen, A.Denisenko, E.Kohn; University of Ulm Using CVD-diamond in MEMS technologies |
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Frank Felgenhauer, Simon Fabel and Wolfgang Mathis Frank
Felgenhauer; Uni Hannover On the Analysis of Parasitic Quantum Effects in Classical MOS Circuits |
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Michael Sadd, Rajesh Rao, Ramachandran Muralidhar; Freescale
Semiconductor Austin, TX Compact Modeling of Non-volatile Memory Devices |
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Coffee Break |
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Bertrand Parvais, Antonio Cerdeira, Dominique Schreurs and J.-P.Raskin; UCL and IMEC Nonlinear performance comparison for FD and PD SOI MOSFETs based on the Integral Function Method and Volterra modeling |
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Cornell van Niekerk and Dominique Schreurs*; University of
Stellenbosch and *KUL Leuven An Adaptive Multi-Bias S-Parameter Measurement Procedure for Nonlinear Device Modelling |
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Chittoor Parthasarathy, Emmanuel Vincen, Philippe Raynaud*,
Cyril
Descleves* STMicroelectronics and *Mentor Graphics. Reliability simulation on CMOS 90nm design using Eldo |
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17:00 |
End of the MOS-AK Workshop |
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Bart Nauwelaers and Dominique Schreurs Presentation of the Modeling and Design Activities at ESAT-KUL The division
ESAT-TELEMIC of the K.U.Leuven has a broad experience in microwave
modelling activities. In the field of microwave circuits and devices
models have been constructed in the following ranges: passive
components on semiconductor and insulating substrates, active devices
in technologies based on FET and BJT-structures with substrates ranging
from Si, over GaAs, to InP and GaN, with a recent evolution to more
complex structures and behavioural modeling. The modeling techniques
used are mostly measurement-based, with measurements taken from linear
and non-linear network analysers. During the talk we will give an
overview of the techniques used for model construction and of a number
of results obtained for varies devices.
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Phil A. Mawby; University of Wales Swansea Power devices compact modeling This paper will
focus on the issues, which differentiate the development of compact
models for power devices from the development of models of other
microelectronic devices. The paper will discuss the modelling of
power diodes, MOSFETs and IGBTs, which form the set of devices most
currently used in power electronics today. A description of the
modelling of the gate input capacitance and the drain resistances are
the main distinguishing features of the power MOSFET. Whilst for the
bipolar devices and accurate modelling of the heavily conductivity
modulated plasma region plays a key role in the successful modelling of
the devices. Finally for all power devices the electro-thermal
interaction is a key modelling effort at the current time. Some current
ideas on the modelling and parameter extraction will be presented.
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Hany Mohamed Taher Abdelrahmanm; KUL Behavior modeling for LDMOS devices We have developed
a large signal -nonlinear model for LDMOS devices. The model is
constructed from time domain large signal simulations by utilizing
Artificial Neural Network (ANN) for fitting instead of polynomial. The
behavioral model can be recognized, as terminal currents are functions
of terminal voltages. The main advantage of the ANN model is the easy
of its extraction in comparison with other compact models. Good
comparison found between the output of the ANN model and the output
from the simulation of BSISM3v3 model.
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Matthias Bucher, Francois Krummenacher*, A. Bazigos**; TUC,
Chania, *EPFL, Lausanne, **NTUA, Athens Advances in MOSFET charges modeling Charge modeling
aspects of MOSFET inversion, depletion and accumulation
charge for deep submicron CMOS in the EKV3.0 MOSFET model are
presented. The basics of MOSFET charge modeling are reviewed.
Linearization methods utilized for inversion and depletion charge
expressions are outlined and comparisons to the theoretical surface
potential model are provided. A continuous model for node charges is
obtained featuring natural charge partitioning, correct asymptotic
capacitance behavior and symmetric capacitances at forward/reverse
boundaries. The charge model is extended to account for polydepletion
and quantum effects in thin-oxide devices. Short-channel device
characteristics are also affected by overlap capacitances. Finally,
polydepletion effects may occur in accumulation, allowing to model also
varactor-type MOS capacitances. The EKV3.0 model is compared vs. CV
measurement from advanced CMOS technologies.
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Nobuyuki Itoh; Toshiba MOSFET modeling for RF circuit design RF circuit
designer has often faced inaccuracy and inconvenience of compact model
such as DC model accuracy, noise model accuracy and scalable substrate
network model. In the case of DC model of the compact model, the
discontinuity between diffusion current and drift current is one of the
essential. Also the influence of STI stress for DC
characteristics is cause of less accuracy of scalable model of the
recent small geometry devices. The noise model is one of the most
important one for analog circuit designer but the analog designer has
often faced inaccuracy of noise model for both thermal noise model and
flicker noise model. For RF design, substrate network is one of
the most important and it has often influenced for circuit design
accuracy beyond 1 GHz. The scalable substrate model is strongly
required. In this session, author would like to point out above
inaccuracy and inconvenience with practical example. Author also
shows the result of some improvement works.
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J. Ramos, A. Mercha, W. Jeamsaksiri, D. Linten1, S. Jenei,
S. Thijs, A.J. Scholten2, P. Wambacq1, I. Debusschere, S. Decoutere IMEC Leuven, 1 Also with the Vrije Universiteit Brussel, 2Philips Research Eindhoven A 90nm RF CMOS technology supported by device modeling and circuit demonstrators Ever increasing
computation requirements have lead CMOS technology through a rapid
downscaling. As a consequence, its speed limitation has been overcome,
turning CMOS technology into a serious competitor with Bipolar or III-V
technologies in Radio-frequency (RF) applications. This fact opens a
new window in which, for the first time, a fully integrated CMOS
Mixed-Signal System-on-Chip is made possible. RF operation introduces
new challenges in the CMOS modeling. In this work we present a 90nm RF
CMOS technology featuring 70nm physical gate length MOSFETs and high Q
passive devices. Suitable RF models for active (MM11 compact model) and
passive (In-House) devices enabled designers to demonstrate circuits
operating at 5GHz.
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Ahmed Alabadelah, Dominique Schreurs, Cornell van Niekerk*,
and Bart Nauwelaers; K.U.Leuven and *University of Stellenbosch Methodology to validate and inter-compare RF models In most of the
papers, researchers show what they would like to show when they compare
their model with measurements, which can mislead the reader when
ignoring other significant measurements. Several standardization
efforts were initialized, like the work that has been done by Compact
Modeling Council (CMC), but was limited to DC, CV and temperature
measurements. Other paper compared nonlinear MESFET models, but there
was no real winner. Within the framework of TARGET, we will compare,
power devices and power amplifier models based on several tests. We
found out that any “good” nonlinear model should pass five
tests, which
are: 1- DC test, 2- CV test, 3- RF (S-parameters) test, 4- Soft
nonlinearities test (Inter-Modulation Distortion (IMD)) test, 5- Hard
nonlinearities test (Harmonics).
V.A. Gergel, M.N. Yakupov; Russia Academy of Science Quasi-hydrodynamic extension of gradual channel and charge sheets approximations of MOSFET models In
sub-deep-micron transistors the crucial role plays electroheating of
carriers with two-dimensional distribution of high electric fields (up
to 10^5-10^6 V/cm). And so the modern MOSFETs models which are based on
drift-diffusion equations with gradual channel and charge sheets
approximations and contain hundreds of adjustment parameters can be
treated as a possibility for analytic calibration of experimental
dependences. From the other side there are a lot of complex tools used
to simulate MOSFETs characteriscs from energy transport equations, but
they are very time consuming and complicated for the verification of
dependencies and model parameters. We propose to use quasi-hydrodynamic
description of electron drift with account for mobility and energy
relaxation time dependencies of electron temperature and formulate
semi-analytic extention of gradual channel and charge sheets
approximations of MOSFET models. We discuss some possible applications
of this techinque on sectioned channel and gap-mismatching
semiconductor structures and show how it describes a super-speed
electron drift which is known as overshoot effect.
Fadhila Haned*, Mohamed BenChouikha*, Andre Baguenier Desormeaux**, Georges Alquié** LISIF, Université Pierre et Marie Curie* Cadence Design Systems SAS France Verilog-A behavioral models of optoelectronic devices for Color Sensor Design The recent
advancements in the areas of CMOS sensors have lead to low-power,
low-noise, portable and low coast imaging systems. However, in color
imaging fields, CMOS sensors are still using photodiodes and RGB
optical filters combination. This entails many limitations to the color
imaging sensor performances. We reported that buried junctions color
detectors represent good alternatives to overcome these limitations.
However, successful design of integrated color sensor using buried
junction detectors, such as active pixel circuits for multispectral
cameras and spatial applications, requires an accurate knowledge of the
color detectors behaviors. Unfortunately, circuit simulators do not
provide models for these devices. Further, only voltage and current
sources are available in CAD tools. In order to overcome these
limitations and make the designer task more flexible, an Optoelectronic
library under CADENCE design tool has been developed. This library has
been obtained by implementing in Spectre simulator the behavioral
models of the Buried Douple pn Junction (BDJ) device and of a set of
optical sources. These modules, BDJ and the optical sources, have been
described using Verilog-A language and their cellviews have been
created using the Affirma Analog Circuit Design Environment. By a
number of different sources, the designer can choose an optical
stimulus spectral distribution corresponding to a specific application.
He can also select from the source cellview the total power incident on
the BDJ surface. The simulation results of the BDJ spectral response
and dark current obtained under Affirma Analog Circuit Design
Environment give best fit to experimental data. Furthermore, series of
test simulations on active pixel sensor architectures were carried out.
We noted the absence of convergence errors or mathematical faults
during stationary DC and transient simulations. The results confirm the
robustness of our optoelectronic CAD models.
Patrick Mulder, Evelyn Grossar; IMEC Compact modeling of digital circuits in deep-submicron CMOS In the past, the
ITRS roadmap for microprocessors was mainly driven by the system clock
frequency. However, for Internet or network applications not the CPU
frequency but the total cost of the system is of critical importance.
Today, the cost is determined at design-time by silicon area and IP
reusability, whereas at system-run-time it is the standby- and
active-power consumption. The need for circuit compact models is
twofold: As different MOS device concepts and process technology
options become available, it is interesting to quickly predict effects
on system-level without making an expensive maskset. Second, for
applications where power consumptions is critical, accurate compact
models are necessary for optimum timing at low-voltage operation. The
presentation will present some results on some basic digital circuits.
R. F. Scholz, B. Senapati, W. Kissinger, E. Matthus and S. Jaetzlau; IHP Microelectronics A Differentiated MPW and Prototyping Service with Advanced RF Performance IHP offers 0.25
µm SiGe:C BiCMOS technologies with high RF performance and high
voltages for MPW & Prototyping. The service is also available via
Europractice. Technologies include HBTs with peak frequencies up
to 200 GHz as well as with breakdown voltages up to 7 V. They target
wireless and broadband applications incl. fiber-optic communication and
automotive sensors. Complementary HBT modules as well as modules with a
still higher performance are under
development. Technologies with integrated
complementary RF LDMOS modules offer devices working at fmax up to
50(22) GHz for n(p) type. Breakdown voltages up to 26(-13.5) V are
reached. These technologies target system-on-chip solutions for power
amplification, power management, DC to DC converters, and drivers for
motors and LCD displays. Devices with higher breakdown voltages are
under development.
Rob Streeder, Agilent Measurement Solutions without Compromise: Agilent 41000 Series, Integrated Parametric Analysis and Characterization Environment (iPACE) Agilent is very pleased to announce the new generation of
semiconductor parameter analysers, with several new products of high
measurement accuracy: The Agilent 41000 Series. The main benefits are
that it is a fully integrated solution, and ready to use with semi auto
and auto probers. It also provides highly accurate IV-CV measurements
(fA level&fF level). The new semiconductor parameter analyzer 4157B
has an improved SMU technology to achieve atto Amper level measurement,
where Agilent created the concept of Atto Sense Unit, that perform aA
level, with an integrated switch to perform IV-CV measurements without
any reconnection. The new switching matrixes B2200A and B2201A provide
more inputs ports with low current and low CV capabilities. They have
14 inputs port (8 triax and 6 BNC) to evaluate advanced devices with
high performance.
Marc Vanden Bossche, NMDG Engineering bvba A new dimension to transistor characterization and modeling through large-signal network analysis NMDG Engineering Through
large-signal network analysis it is possible to study the
characteristics of transistors in small - signal mode under matched
conditions and in large - signal mode under mismatched conditions. The
applied signals can go from a continuous wave to a modulation signal.
This type of analysis provides the process and modeling engineer all
the means to make sure that the transistor is reliable under realistic
conditions and that the models will probably function when used by
designers in realistic conditions.
Marek Mierzwinski; Tiburon Design Automation,
Santa Rosa, CANew Capabilities for Verilog-A Compact Device Models The purpose of
the poster is describe how new advances in implementation of the
Verilog-A language in analog simulators provides an ideal development
and release process for compact models. The key point of the
presentation is that while Verilog-A is a natural language for compact
models, end-users will not accept it unless it is completely
transparent to them. Verilog-A models should have no short-comings or
restrictions compared to native, c-coded models. Most analog simulators
already support Verilog-A for behavioral modeling. The Tiburon
implementation of this standard language relies on close collaboration
with simulator vendors. The RTE is an application-program interface
(API) that connects the model to the simulator in a way such that no
simulator functional is lost. Verilog-A has been shown to be a capable
and natural language for compact model development. It relieves the
developer of many complex and mundane tasks, allowing them to
concentrate on model development. Verilog-A has become more popular and
is now widely supported in most analog simulators.
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Gerard Dubois, Jean-Marc Rousseau, Daniel Andrade; Altis Semiconductor Using TCAD to Minimize Process Dispersions After
calibrating TCAD deck on a .18µ process for NFET and PFET
we use it to determine which parts of the process are the major
contributors of the dispersion of the electrical characteristics of the
FET and to rank them by order of magnitude. The following will describe
how the polysilicon gate dimension dispersion will induce dispersion in
the electrical parameters of the transistors , mainly IDS , Vt and
Ioff. The second major source of dispersion are the temperatures
at fast thermal anneals thru the dispersion inside the RTA
furnaces and showing that Ldd/ Halo anneals are the most
important contributor in the electrical parameters
dispersion. Finally we will describe an industrial
method to minimize the dispersion lot to lot by changing the Halo Ion
implant dose by class of polysilicon gate dimension.
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R.Müller, J.Kusterer, P.Schmid, K.Janischowsky, F.J.
Hernandez-Guillen, A.Denisenko, E.Kohn; University of Ulm Using CVD-diamond in MEMS technologies Diamond
can
be
used
as universal MEMS material with extreme properties in many
respects, namely hardness, Youngs modulus, fracture strain, thermal
conductivity and chemical inertness. In addition, it is a wide-band-gap
semiconductor and can be highly insulating, semiconducting and
quasi-metallic by doping. It represents a multi-functional material,
substituting complex material stacksIn this talk, we will concentrate
on nanocrystalline diamond films, which have been grown by CVD on
100-oriented silicon. Their mechanical properties may be highlighted by
a fracture strength of more than 4.0 GPa and Youngs moduli of up to
1020 GPa. Variation in deposition parameters allow to tailor the
vertical and horizontal stress distribution from heavily strained to
virtually stress free. As an example, out of the field of RF-MEMS,
microswitches will be discussed. This will be firstly an
electrostatically driven RF microswitch for high power application,
which can operate up very high temperatures (650°C) and second a
thermally driven bi-stable microswitch with very low switching voltage
(1.3 V) and high actuation force. Secondly, we will address the field
of fluidics and chemistry with a thermally actuated diamond micro
membrane pump and a bubble jet element which has been used in the
synthesis of oligonucleotides and spotting. This structure has been
refined to a point where the liquid is only in contact with diamond.
This may enable further novel applications like patterned etching by
dispensing highly aggressive liquids.
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Frank Felgenhauer, Simon Fabel and Wolfgang Mathis; Uni
Hannover On the Analysis of Parasitic Quantum Effects in Classical MOS Circuits The scaling of
MOSFETs has reached the sub 100nm regime and the former negligible
parasitic quantum-mechanical (QM) effects gain a significant influence.
The MOS device performance is affected by gate-induced quantization
effects leading to a loss of transconductance and threshold voltage
shift and gate leakage tunneling currents. The question about the
validity of common MOS device model raises. In this manner either the
classical models are quantum-mechanically augmented (semi-classical
description: density gradient method, effective quantum potential
approach) or new fully quantum-mechanical models are developed (2D-NEGF
Anantram, Jovanovic). The current published research work in this area
was focused mainly on the device model and the question about the
influence of the QM-effects on circuit functionality is almost missed
out. To investigate the impact on the circuit level we established the
following concept. (1) We identify QM-effects which affect MOS devices
(2) and give their quantum-mechanical correctly simulation. (3) On the
base of the numerical simulation results we establish spice circuit
models to reproduce the impact in circuit simulation. (4) In circuit
simulation these models are supported by the standard drift-diffusion
models for device behavior itself, enabling the effect impact analysis
on the circuit level.
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Michael Sadd, Rajesh Rao, Ramachandran Muralidhar; Freescale
Semiconductor Austin, TX Compact Modeling of Non-volatile Memory Devices Memory devices
exploit hysteresis effects of any of several physical processes to
store information. These processes often operate under conditions that
the very different from logic CMOS and/or would actually represent a
failure mode for logic transistors. Unique challenges and issues will
be illustrated by concentrating on charge storage non-volatile memories
(NVM). The key step in modeling these devices is extraction of the
underlying MOSFET parameters and coupling capacitances. This procedure
is well understood. Accurately modeling the program and erase
operations is somewhat more difficult, however. Finally, we
introduce the challenges posed in modeling charge trapping devices,
such as SONOS and the nano-crystal memory, which are leading candidates
for scaling silicon NVM past 0.1 mm.
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Bertrand Parvais, Antonio Cerdeira, Dominique Schreurs and
J.-P.Raskin; UCL and IMEC Nonlinear performance comparison for FD and PD SOI MOSFETs based on the Integral Function Method and Volterra modeling The harmonic and
intermodulation distortion of both Fully-Depleted (FD) and
Partially-Depleted (PD) Silicon-on-Insulator (SOI) MOSFETs is
studied. The analysis is based on the recently developped
Integral Function Method (IFM) and results are compared to a
third-order Volterra model of the MOSFET. This modeling helps us to
understand the nonlinear mechanisms of the considered devices and to
predict their frequency behavior. The models are validated through
Large-Signal Network Analyzer measurements. The devices
performances are disscussed.
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Cornell van Niekerk and Dominique Schreurs*; University of
Stellenbosch and *KUL An Adaptive Multi-Bias S-Parameter Measurement Procedure for Nonlinear Device Modelling A
new technology independant adaptive measurement procedure is described
for
controlling an automated S-Parameter and DC transistor characterisation
setup. The algorithm analyses both the
DC and S-Parameter data measured on the device and use the result to
concentrate
more bias points into areas of the device I-V bias plane where the
device
characteristics are changing rapidly. The use of S-Parameter data in
the adaptive algorithm is
explored as the
AC data is crucial in the construction of nonlinear models and changes
in the
AC responce of the device is not always reflected accurately in the
device DC
characteristics. The aquisition of
accurate multi-bias data is an important step in the development of
measurement
based nonlinear models. The impact of bias point distribution and
density is
however not an aspect that has been extensively studied. Initial
nonlinear modelling results have also
indicated that this procedure will allow for the construction of
table-based
nonlinear models that the same level of accuracy as currently used
table-based
models, but using significantly less data.
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Chittoor Parthasarathy, Emmanuel Vincen, Philippe Raynaud*,
Cyril
Descleves* STMicroelectronics and *Mentor Graphics. Reliability simulation on CMOS 90nm design using Eldo Nanometer
processes show an increasing importance of aging effects (Hot Carrier,
NBTI) on design reliability, and this needs to be considered at design
level, as post silicon product reliability analyses can become
expensive and sometimes difficult to perform. The reliability analysis
done at SPICE level provides the best scope to associate physical
effects to designs. This paper presents the new reliability interface
developed in the Eldo simulator in 2004, and its application to 90nm ST
technology. In these technologies, the SPICE simulation methodology is
complex and the reliability assessment at SPICE level has some
requirements to be fulfilled. These factors will be discussed. In
addition, the evolution of certain SPICE parameters during the
different degradations will be discussed.
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