Arbeitskreis Modellierung von Systemen und Parameterextraktion 
Modeling of Systems and Parameter Extraction Working Group
  MOS-AK ESSDERC/ESSCIRC Workshop
20 September 2004, Leuven
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Mission
Committee
MOS-AK: Enabling Compact Modeling R&D Exchange
  Final Program



Freescale
Publication Partner:
International Journal of Numerical Modelling: Electronic Networks, Devices and Fields
Editor, Europe: Phil Mawby

Acknowledgments:
This MOS-AK meeting is organized in collaboration with
the "Bilateral scientific cooperation between Flanders and South-Africa (BIL02/35)"
organizers: Bart Nauwelaers, Dominique Schreurs and Wladek Grabinski
in cooperation with K.U.Leuven, IMEC and Flemish  Government [*]
  9:25- 9:30
Welcome: W.Grabinski

9:30-12:10
Morning Session
Chairmen: Prof. H.Iwai and W. Grabinski


Bart Nauwelaers and Dominique Schreurs;
KUL Leuven
Presentation of the Modeling and Design Activities at ESAT-KUL


Phil A. Mawby; University of Wales Swansea
Power devices compact modeling


Hany Mohamed Taher Abdelrahmanm; KUL Leuven
Behavior modeling for LDMOS devices


Coffee Break


Matthias Bucher, Francois Krummenacher*, A. Bazigos**; TUC, Chania, *EPFL, Lausanne, **NTUA, Athens
Advances in MOSFET charges modeling



Nobuyuki Itoh; Toshiba
MOSFET modeling for RF circuit design


J. Ramos, A. Mercha, W. Jeamsaksiri, D. Linten1, S. Jenei, S. Thijs, A.J. Scholten2, P. Wambacq1, I. Debusschere, S. Decoutere; IMEC Leuven, 1 Also with the Vrije Universiteit Brussel, 2Philips Research Eindhoven,
A 90nm RF CMOS technology supported by device modeling and circuit demonstrators

12:10-12:30
Poster Session
Chairman: W.Grabinski


Ahmed Alabadelah, Dominique Schreurs, Cornell van Niekerk*, and Bart Nauwelaers; K.U.Leuven and *University of Stellenbosch
Methodology to validate and inter-compare RF models
 
V.A. Gergel, M.N. Yakupov;  Russia Academy of Science
Quasi-hydrodynamic extension of gradual channel and charge sheets approximations of MOSFET models

Fadhila Haned*, Mohamed BenChouikha*, Andre Baguenier Desormeaux**, Georges Alquié** LISIF, Université Pierre et Marie Curie* Cadence Design Systems
Verilog-A  behavioral models of optoelectronic devices for Color Sensor Design


Patrick Mulder, Evelyn Grossar; IMEC
Compact modeling of digital circuits in deep-submicron CMOS

R. F. Scholz, B. Senapati, W. Kissinger, E. Matthus and S. Jaetzlau; IHP Microelectronics
A Differentiated MPW and Prototyping Service with Advanced RF Performance


Rob Streeder, Agilent
Measurement Solutions without Compromise:
Agilent 41000 Series, Integrated Parametric Analysis and Characterization Environment (iPACE)

Marc Vanden Bossche, NMDG Engineering bvba
A new dimension to transistor characterization and modeling through large-signal network analysis NMDG Engineering

Marek Mierzwinski; Tiburon Design Automation, Santa Rosa, CA
New Capabilities for Verilog-A Compact Device Models

12:30-14:00 Lunch
14:00-17:00
Afternoon Session
Chairmen: Prof. B.
Nauwelaers and W.Grabinski


Gerard Dubois, Jean-Marc Rousseau, Daniel Andrade; Altis Semiconductor
Using TCAD to Minimize Process Dispersions


R.Müller, J.Kusterer, P.Schmid, K.Janischowsky, F.J. Hernandez-Guillen, A.Denisenko, E.Kohn; University of Ulm
Using CVD-diamond in MEMS technologies



Frank Felgenhauer, Simon Fabel and Wolfgang Mathis Frank Felgenhauer; Uni Hannover
On the Analysis of Parasitic Quantum Effects in Classical MOS Circuits


Michael Sadd, Rajesh Rao, Ramachandran Muralidhar; Freescale Semiconductor Austin,  TX
Compact Modeling of Non-volatile Memory Devices


Coffee Break


Bertrand Parvais, Antonio Cerdeira, Dominique Schreurs and J.-P.Raskin; UCL and IMEC
Nonlinear performance comparison for FD and PD SOI MOSFETs based on the Integral Function Method and Volterra modeling


Cornell van Niekerk and Dominique Schreurs*; University of Stellenbosch and *KUL Leuven
An Adaptive Multi-Bias S-Parameter Measurement Procedure for Nonlinear Device Modelling



Chittoor Parthasarathy, Emmanuel Vincen, Philippe Raynaud*, Cyril Descleves* STMicroelectronics and *Mentor Graphics.
Reliability simulation on CMOS 90nm design using Eldo


17:00
End of the MOS-AK Workshop

  Short Abstrcts

Bart Nauwelaers and Dominique Schreurs
Presentation of the Modeling and Design Activities at ESAT-KUL
The division ESAT-TELEMIC of the K.U.Leuven has a broad experience in microwave modelling activities. In the field of microwave circuits and devices models have been constructed in the following ranges: passive components on semiconductor and insulating substrates, active devices in technologies based on FET and BJT-structures with substrates ranging from Si, over GaAs, to InP and GaN, with a recent evolution to more complex structures and behavioural modeling. The modeling techniques used are mostly measurement-based, with measurements taken from linear and non-linear network analysers. During the talk we will give an overview of the techniques used for model construction and of a number of results obtained for varies devices. 

Phil A. Mawby; University of Wales Swansea
Power devices compact modeling
This paper will focus on the issues, which differentiate the development of compact models for power devices from the development of models of other microelectronic devices.  The paper will discuss the modelling of power diodes, MOSFETs and IGBTs, which form the set of devices most currently used in power electronics today. A description of the modelling of the gate input capacitance and the drain resistances are the main distinguishing features of the power MOSFET. Whilst for the bipolar devices and accurate modelling of the heavily conductivity modulated plasma region plays a key role in the successful modelling of the devices. Finally for all power devices the electro-thermal interaction is a key modelling effort at the current time. Some current ideas on the modelling and parameter extraction will be presented.

Hany Mohamed Taher Abdelrahmanm; KUL
Behavior modeling for LDMOS devices
We have developed a large signal -nonlinear model for LDMOS devices. The model is constructed from time domain large signal simulations by utilizing Artificial Neural Network (ANN) for fitting instead of polynomial. The behavioral model can be recognized, as terminal currents are functions of terminal voltages. The main advantage of the ANN model is the easy of its extraction in comparison with other compact models. Good comparison found between the output of the ANN model and the output from the simulation of BSISM3v3 model.

Matthias Bucher, Francois Krummenacher*, A. Bazigos**; TUC, Chania, *EPFL, Lausanne, **NTUA, Athens
Advances in MOSFET charges modeling
Charge modeling aspects of MOSFET inversion, depletion and accumulation charge for deep submicron CMOS in the EKV3.0 MOSFET model are presented. The basics of MOSFET charge modeling are reviewed. Linearization methods utilized for inversion and depletion charge expressions are outlined and comparisons to the theoretical surface potential model are provided. A continuous model for node charges is obtained featuring natural charge partitioning, correct asymptotic capacitance behavior and symmetric capacitances at forward/reverse boundaries. The charge model is extended to account for polydepletion and quantum effects in thin-oxide devices. Short-channel device characteristics are also affected by overlap capacitances. Finally, polydepletion effects may occur in accumulation, allowing to model also varactor-type MOS capacitances. The EKV3.0 model is compared vs. CV measurement from advanced CMOS technologies.

Nobuyuki Itoh; Toshiba
MOSFET modeling for RF circuit design
RF circuit designer has often faced inaccuracy and inconvenience of compact model such as DC model accuracy, noise model accuracy and scalable substrate network model.  In the case of DC model of the compact model, the discontinuity between diffusion current and drift current is one of the essential.  Also the influence of STI stress for DC characteristics is cause of less accuracy of scalable model of the recent small geometry devices.  The noise model is one of the most important one for analog circuit designer but the analog designer has often faced inaccuracy of noise model for both thermal noise model and flicker noise model.  For RF design, substrate network is one of the most important and it has often influenced for circuit design accuracy beyond 1 GHz.  The scalable substrate model is strongly required. In this session, author would like to point out above inaccuracy and inconvenience with practical example.  Author also shows the result of some improvement works.

J. Ramos, A. Mercha, W. Jeamsaksiri, D. Linten1, S. Jenei, S. Thijs, A.J. Scholten2, P. Wambacq1, I. Debusschere, S. Decoutere
IMEC Leuven, 1 Also with the Vrije Universiteit Brussel, 2Philips Research Eindhoven
A 90nm RF CMOS technology supported by device modeling and circuit demonstrators
Ever increasing computation requirements have lead CMOS technology through a rapid downscaling. As a consequence, its speed limitation has been overcome, turning CMOS technology into a serious competitor with Bipolar or III-V technologies in Radio-frequency (RF) applications. This fact opens a new window in which, for the first time, a fully integrated CMOS Mixed-Signal System-on-Chip is made possible. RF operation introduces new challenges in the CMOS modeling. In this work we present a 90nm RF CMOS technology featuring 70nm physical gate length MOSFETs and high Q passive devices. Suitable RF models for active (MM11 compact model) and passive (In-House) devices enabled designers to demonstrate circuits operating at 5GHz.


Ahmed Alabadelah, Dominique Schreurs, Cornell van Niekerk*, and Bart Nauwelaers; K.U.Leuven and *University of Stellenbosch
Methodology to validate and inter-compare RF models
In most of the papers, researchers show what they would like to show when they compare their model with measurements, which can mislead the reader when ignoring other significant measurements. Several standardization efforts were initialized, like the work that has been done by Compact Modeling Council (CMC), but was limited to DC, CV and temperature measurements. Other paper compared nonlinear MESFET models, but there was no real winner. Within the framework of TARGET, we will compare, power devices and power amplifier models based on several tests. We found out that any “good” nonlinear model should pass five tests, which are: 1- DC test, 2- CV test, 3- RF (S-parameters) test, 4- Soft nonlinearities test (Inter-Modulation Distortion (IMD)) test, 5- Hard nonlinearities test (Harmonics).

V.A. Gergel, M.N. Yakupov;  Russia Academy of Science
Quasi-hydrodynamic extension of gradual channel and charge sheets approximations of MOSFET models
In sub-deep-micron transistors the crucial role plays electroheating of carriers with two-dimensional distribution of high electric fields (up to 10^5-10^6 V/cm). And so the modern MOSFETs models which are based on drift-diffusion equations with gradual channel and charge sheets approximations and contain hundreds of adjustment parameters can be treated as a possibility for analytic calibration of experimental dependences. From the other side there are a lot of complex tools used to simulate MOSFETs characteriscs from energy transport equations, but they are very time consuming and complicated for the verification of dependencies and model parameters. We propose to use quasi-hydrodynamic description of electron drift with account for mobility and energy relaxation time dependencies of electron temperature and formulate semi-analytic extention of gradual channel and charge sheets approximations of MOSFET models. We discuss some possible applications of this techinque on sectioned channel and gap-mismatching semiconductor structures and show how it describes a super-speed electron drift which is known as overshoot effect.

Fadhila Haned*, Mohamed BenChouikha*, Andre Baguenier Desormeaux**, Georges Alquié** LISIF, Université Pierre et Marie Curie* Cadence Design Systems SAS France
Verilog-A  behavioral models of optoelectronic devices for Color Sensor Design
The recent advancements in the areas of CMOS sensors have lead to low-power, low-noise, portable and low coast imaging systems. However, in color imaging fields, CMOS sensors are still using photodiodes and RGB optical filters combination. This entails many limitations to the color imaging sensor performances. We reported that buried junctions color detectors represent good alternatives to overcome these limitations. However, successful design of integrated color sensor using buried junction detectors, such as active pixel circuits for multispectral cameras and spatial applications, requires an accurate knowledge of the color detectors behaviors. Unfortunately, circuit simulators do not provide models for these devices. Further, only voltage and current sources are available in CAD tools. In order to overcome these limitations and make the designer task more flexible, an Optoelectronic library under CADENCE design tool has been developed. This library has been obtained by implementing in Spectre simulator the behavioral models of the Buried Douple pn Junction (BDJ) device and of a set of optical sources. These modules, BDJ and the optical sources, have been described using Verilog-A language and their cellviews have been created using the Affirma Analog Circuit Design Environment. By a number of different sources, the designer can choose an optical stimulus spectral distribution corresponding to a specific application. He can also select from the source cellview the total power incident on the BDJ surface. The simulation results of the BDJ spectral response and dark current obtained under Affirma Analog Circuit Design Environment give best fit to experimental data. Furthermore, series of test simulations on active pixel sensor architectures were carried out. We noted the absence of convergence errors or mathematical faults during stationary DC and transient simulations. The results confirm the robustness of our optoelectronic CAD models.

Patrick Mulder, Evelyn Grossar; IMEC
Compact modeling of digital circuits in deep-submicron CMOS
In the past, the ITRS roadmap for microprocessors was mainly driven by the system clock frequency. However, for Internet or network applications not the CPU frequency but the total cost of the system is of critical importance. Today, the cost is determined at design-time by silicon area and IP reusability, whereas at system-run-time it is the standby- and active-power consumption. The need for circuit compact models is twofold: As different MOS device concepts and process technology options become available, it is interesting to quickly predict effects on system-level without making an expensive maskset. Second, for applications where power consumptions is critical, accurate compact models are necessary for optimum timing at low-voltage operation. The presentation will present some results on some basic digital circuits.

R. F. Scholz, B. Senapati, W. Kissinger, E. Matthus and S. Jaetzlau; IHP Microelectronics
A Differentiated MPW and Prototyping Service with Advanced RF Performance
IHP offers 0.25 µm SiGe:C BiCMOS technologies with high RF performance and high voltages for MPW & Prototyping. The service is also available via Europractice.  Technologies include HBTs with peak frequencies up to 200 GHz as well as with breakdown voltages up to 7 V. They target wireless and broadband applications incl. fiber-optic communication and automotive sensors. Complementary HBT modules as well as modules with a still higher performance are under development.      Technologies with integrated complementary RF LDMOS modules offer devices working at fmax up to 50(22) GHz for n(p) type. Breakdown voltages up to 26(-13.5) V are reached. These technologies target system-on-chip solutions for power amplification, power management, DC to DC converters, and drivers for motors and LCD displays. Devices with higher breakdown voltages are under development.  

Rob Streeder, Agilent
Measurement Solutions without Compromise:
Agilent 41000 Series, Integrated Parametric Analysis and Characterization Environment (iPACE)
Agilent is very pleased to announce the new generation of semiconductor parameter analysers, with several new products of high measurement accuracy: The Agilent 41000 Series. The main benefits are that it is a fully integrated solution, and ready to use with semi auto and auto probers. It also provides highly accurate IV-CV measurements (fA level&fF level). The new semiconductor parameter analyzer 4157B has an improved SMU technology to achieve atto Amper level measurement, where Agilent created the concept of Atto Sense Unit, that perform aA level, with an integrated switch to perform IV-CV measurements without any reconnection. The new switching matrixes B2200A and B2201A provide more inputs ports with low current and low CV capabilities. They have 14 inputs port (8 triax and 6 BNC) to evaluate advanced devices with high performance.

Marc Vanden Bossche, NMDG Engineering bvba
A new dimension to transistor characterization and modeling through large-signal network analysis NMDG Engineering
Through large-signal network analysis it is possible to study the characteristics of transistors in small - signal mode under matched conditions and in large - signal mode under mismatched conditions. The applied signals can go from a continuous wave to a modulation signal. This type of analysis provides the process and modeling engineer all the means to make sure that the transistor is reliable under realistic conditions and that the models will probably function when used by designers in realistic conditions.

Marek Mierzwinski; Tiburon Design Automation, Santa Rosa, CA
New Capabilities for Verilog-A Compact Device Models
The purpose of the poster is describe how new advances in implementation of the Verilog-A language in analog simulators provides an ideal development and release process for compact models. The key point of the presentation is that while Verilog-A is a natural language for compact models, end-users will not accept it unless it is completely transparent to them. Verilog-A models should have no short-comings or restrictions compared to native, c-coded models. Most analog simulators already support Verilog-A for behavioral modeling. The Tiburon implementation of this standard language relies on close collaboration with simulator vendors. The RTE is an application-program interface (API) that connects the model to the simulator in a way such that no simulator functional is lost. Verilog-A has been shown to be a capable and natural language for compact model development. It relieves the developer of many complex and mundane tasks, allowing them to concentrate on model development. Verilog-A has become more popular and is now widely supported in most analog simulators.


Gerard Dubois, Jean-Marc Rousseau, Daniel Andrade; Altis Semiconductor
Using TCAD to Minimize Process Dispersions
After  calibrating TCAD deck on  a .18µ process for NFET and PFET we use it to determine which parts of the process are the major contributors of the dispersion of the electrical characteristics of the FET and to rank them by order of magnitude. The following will describe how the polysilicon gate dimension dispersion will induce dispersion in the electrical parameters of the transistors , mainly IDS , Vt and Ioff. The second major source of dispersion are the  temperatures at fast thermal anneals  thru  the dispersion inside the RTA furnaces and  showing that  Ldd/ Halo anneals are the most important contributor  in the electrical parameters dispersion.   Finally  we will describe an industrial method to minimize the dispersion lot to lot by changing the Halo Ion implant dose by class of  polysilicon gate dimension.  

R.Müller, J.Kusterer, P.Schmid, K.Janischowsky, F.J. Hernandez-Guillen, A.Denisenko, E.Kohn; University of Ulm
Using CVD-diamond in MEMS technologies
Diamond can be used as universal MEMS material with extreme properties in many respects, namely hardness, Youngs modulus, fracture strain, thermal conductivity and chemical inertness. In addition, it is a wide-band-gap semiconductor and can be highly insulating, semiconducting and quasi-metallic by doping. It represents a multi-functional material, substituting complex material stacksIn this talk, we will concentrate on nanocrystalline diamond films, which have been grown by CVD on 100-oriented silicon. Their mechanical properties may be highlighted by a fracture strength of more than 4.0 GPa and Youngs moduli of up to 1020 GPa. Variation in deposition parameters allow to tailor the vertical and horizontal stress distribution from heavily strained to virtually stress free. As an example, out of the field of RF-MEMS, microswitches will be discussed. This will be firstly an electrostatically driven RF microswitch for high power application, which can operate up very high temperatures (650°C) and second a thermally driven bi-stable microswitch with very low switching voltage (1.3 V) and high actuation force. Secondly, we will address the field of fluidics and chemistry with a thermally actuated diamond micro membrane pump and a bubble jet element which has been used in the synthesis of oligonucleotides and spotting. This structure has been refined to a point where the liquid is only in contact with diamond. This may enable further novel applications like patterned etching by dispensing highly aggressive liquids.

Frank Felgenhauer, Simon Fabel and Wolfgang Mathis; Uni Hannover
On the Analysis of Parasitic Quantum Effects in Classical MOS Circuits
The scaling of MOSFETs has reached the sub 100nm regime and the former negligible parasitic quantum-mechanical (QM) effects gain a significant influence. The MOS device performance is affected by gate-induced quantization effects leading to a loss of transconductance and threshold voltage shift and gate leakage tunneling currents. The question about the validity of common MOS device model raises. In this manner either the classical models are quantum-mechanically augmented (semi-classical description: density gradient method, effective quantum potential approach) or new fully quantum-mechanical models are developed (2D-NEGF Anantram, Jovanovic). The current published research work in this area was focused mainly on the device model and the question about the influence of the QM-effects on circuit functionality is almost missed out. To investigate the impact on the circuit level we established the following concept. (1) We identify QM-effects which affect MOS devices (2) and give their quantum-mechanical correctly simulation. (3) On the base of the numerical simulation results we establish spice circuit models to reproduce the impact in circuit simulation. (4) In circuit simulation these models are supported by the standard drift-diffusion models for device behavior itself, enabling the effect impact analysis on the circuit level.

Michael Sadd, Rajesh Rao, Ramachandran Muralidhar; Freescale Semiconductor Austin,  TX
Compact Modeling of Non-volatile Memory Devices
Memory devices exploit hysteresis effects of any of several physical processes to store information. These processes often operate under conditions that the very different from logic CMOS and/or would actually represent a failure mode for logic transistors. Unique challenges and issues will be illustrated by concentrating on charge storage non-volatile memories (NVM). The key step in modeling these devices is extraction of the underlying MOSFET parameters and coupling capacitances. This procedure is well understood. Accurately modeling the program and erase operations is somewhat more difficult, however.  Finally, we introduce the challenges posed in modeling charge trapping devices, such as SONOS and the nano-crystal memory, which are leading candidates for scaling silicon NVM past 0.1 mm.

Bertrand Parvais, Antonio Cerdeira, Dominique Schreurs and J.-P.Raskin; UCL and IMEC
Nonlinear performance comparison for FD and PD SOI MOSFETs based on the Integral Function Method and Volterra modeling
The harmonic and intermodulation distortion of both Fully-Depleted (FD) and Partially-Depleted (PD) Silicon-on-Insulator (SOI) MOSFETs is studied.  The analysis is based on the recently developped Integral Function Method (IFM) and results are compared to a third-order Volterra model of the MOSFET. This modeling helps us to understand the nonlinear mechanisms of the considered devices and to predict their frequency behavior. The models are validated through Large-Signal Network Analyzer measurements.  The devices performances are disscussed.

Cornell van Niekerk and Dominique Schreurs*; University of Stellenbosch and *KUL
An Adaptive Multi-Bias S-Parameter Measurement Procedure for Nonlinear Device Modelling
A new technology independant adaptive measurement procedure is described for controlling an automated S-Parameter and DC transistor characterisation setup. The algorithm analyses both the DC and S-Parameter data measured on the device and use the result to concentrate more bias points into areas of the device I-V bias plane where the device characteristics are changing rapidly. The use of S-Parameter data in the adaptive algorithm is explored as the AC data is crucial in the construction of nonlinear models and changes in the AC responce of the device is not always reflected accurately in the device DC characteristics. The aquisition of accurate multi-bias data is an important step in the development of measurement based nonlinear models. The impact of bias point distribution and density is however not an aspect that has been extensively studied. Initial nonlinear modelling results have also indicated that this procedure will allow for the construction of table-based nonlinear models that the same level of accuracy as currently used table-based models, but using significantly less data.

Chittoor Parthasarathy, Emmanuel Vincen, Philippe Raynaud*, Cyril Descleves* STMicroelectronics and *Mentor Graphics.
Reliability simulation on CMOS 90nm design using Eldo
Nanometer processes show an increasing importance of aging effects (Hot Carrier, NBTI) on design reliability, and this needs to be considered at design level, as post silicon product reliability analyses can become expensive and sometimes difficult to perform. The reliability analysis done at SPICE level provides the best scope to associate physical effects to designs. This paper presents the new reliability interface developed in the Eldo simulator in 2004, and its application to 90nm ST technology. In these technologies, the SPICE simulation methodology is complex and the reliability assessment at SPICE level has some requirements to be fulfilled. These factors will be discussed. In addition, the evolution of certain SPICE parameters during the different degradations will be discussed.

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